TUNE-RITE® is designed specifically for semiconductor, flat panel display and photovoltaic equipment engineering applications. Based on the unique SENSE-RITE® RF sensor technology, it provides the most advanced, portable RF measurement instrumentation available in the world.
The unique all-in-one packaging of TUNE-RITE® is pre-configured
with storage space for everything you'll need for the toughest equipment engineering jobs, including:
Chamber matching
RF diagnostics, characterization and documentation
Generator, tune-time, and plasma stability analysis
Matching network efficiency.
Installation and set up is accomplished in just minutes with the ability to perform quick performance measurements or unmanned acquisitions for extended periods of time. In addition, TUNE-RITE® data can be exported in support of bay or fab-wide chamber-to-chamber comparisons.
Matching network signal and computer interface cables
TUNE-RITE® software including Tune-Time Analyzer
TUNE-RITE® incorporates all necessary components for RF network analysis on the manufacturing floor. Unit shown illustrates
post-match installation kit for Applied Materials 200mm etch tools using the Phase 4 or HE match. Contact us for a list of other installation kits available.
The TUNE-RITE® Tune-Time Analyzer provides a means to measure
and compare the tuning speed of automatic impedance matching networks.
Welcome to Forth-Rite Technologies, LLC.
Point of Use RF Metrology
Download the TUNE-RITE® Sales Sheet PDF
