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PRODUCT INFORMATION | SENSE-RITE® OVERVIEW

The Best Sensor for Manufacturing Applications

Designed for either advanced plasma process or equipment control applications, SENSE-RITE® defines the state-of-the-art in RF sensor technology. It provides the highest level of functional integration with the minimum electrical length available.

SENSE-RITE® can be installed "post-match"" in the non-50 ohm environment at the "point-of-use" for RF power due to its flat VSWR of less than 1.05 at operating frequencies up to 60MHz.

It is ideal for both equipment manufacturer (OEMs) and end-user applications including:
  • End Point Detection
  • Closed-Loop Delivered Power
  • RF Power Delivery Network Analysis

SENSE-RITE® can also be integrated into other data acquisition systems for higher level fault detection and classification applications. The 5kW version of SENSE-RITE® is ideal for applications in semiconductor wafer processing. The 30kW version is designed for high power applications in FPD and solar manufacturing.

Proprietary process sensitive data is secured by an encrypted communication interface. SENSE-RITE® is fully contained in a single package for ease of installation in the manufacturing environment.

 
Download the Sense-Rite Sales Sheet PDF
SENSE-RITE
Key Capabilities Include:
  • RMS Voltage
  • RMS Current
  • Phase Angle
  • Delivered RF Power
  • Impedance
  • Patented "One-Box" Solution
  • Secure Digital Interface
  • Patented "On-Board" Calibration
  • Information Storage




The SENSE-RITE® product includes fully functional stand-alone software for data acquisition and viewing; hardware and software documentation; and a software-based sensor simulator for training purposes. Learn more



Installation kits are available for many different process tool configurations and applications (shown are Novellus Speed, C1 and C2 kits). Contact us for a list of currently available installation kits.
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