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| PRODUCT INFORMATION | POWER-RITE® OVERVIEW |
Delivered RF Power Control for Plasma Processing
Stop chasing plasma process variability!
POWER-RITE® provides closed-loop delivered power control for plasma process tools used in the semiconductor, flat panel and photovoltaic manufacturing industries. Proprietary signal processing algorithms provide for fast and accurate delivered RF power control. POWER-RITE® works on either capacitively or inductively coupled plasmas and on either fixed or auto-tuning matching networks.
POWER-RITE uses real-time, point-of-use measurement data from the SENSE-RITE® RF sensor to dynamically control the tool's RF generator, maintaining constant delivered power at the process chamber. The POWER-RITE® user simply sets the desired delivered power (rather than conventional generator forward power) on the process tool and continues normal recipe execution.
POWER-RITE® is a self-contained process control system and does not require access to either the MES or SECS communication channels. It is web-enabled for configuration and monitoring over a LAN or directly from a PC. A permanent LAN or PC connection is not required for operation.
Embedded fail-safes are designed to protect the generator, process tool and product substrate regardless of the state of the POWER-RITE® system.
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 Download the POWER-RITE® Sales Sheet PDF
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Welcome to Forth-Rite Technologies, LLC.
