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HOME | FORTH-RITE TECHNOLOGIES
  • State-of-the-art RF sensor
  • Patented single box solution
  • Next generation equipment control
  • Closed loop delivered RF power
 
  • First RF network analyzer for manufacturing
  • Avoids expensive downtime, aids in chamber matching
  • Family of RF and impedance based end point detection technology
  • Applicable to plasma etch or deposition chamber clean
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